Temperature effect on deposition rate of silicon nitride films

Temperature effects on deposition rate of silicon nitride films were characterized by building a neural network prediction model. The silicon nitride films were deposited by using a plasma enhanced chemical vapor deposition system and process parameter effects were systematically characterized by 2⁶⁻¹ fractional factorial experiment. The process parameters involved include a radio frequency power, pressure, temperature, SiH₄, N₂, and NH₃ flow rates. The prediction performance of generalized regression neural network was drastically improved by optimizing multi-valued training factors using a genetic algorithm. Several 3D plots were generated to investigate parameter effects at various temperatures. Predicted variations were experimentally validated. The temperature effect on the deposition rate was a complex function of parameters but N₂ flow rate. Larger decreases in the deposition rate with the temperature were only noticed at lower SiH₄ (or higher NH₃) flow rates. Typical effects of SiH₄ or NH₃ flow rate were only observed at higher or lower temperatures. A comparison with the refractive index model facilitated a selective choice of either SiH₄ or NH₃ for process optimization.     

An implicit method for linear ill‐posed problems with perturbed operators

An implicit iterative method is applied to solving linear ill‐posed problems with perturbed operators. It is proved that the optimal convergence rate can be obtained after choosing suitable number of iterations. A generalized Morozov's discrepancy principle is proposed for the problems, and then the optimal convergence rate can also be obtained by an a posteriori strategy. The convergence results show that the algorithm is a robust regularization method. Copyright © 2006 John Wiley & Sons, Ltd.     

ALICE实验中光子谱仪的触发选判机制的模拟研究

对ALICE实验光子谱仪的触发选判机制进行了模拟研究, 内容包括: 1) 对光子谱仪的能量重建性能进行了研究, 通过计算机模拟检验光子谱仪探测器对大横动量范围的入射粒子的能量重建性能; 2) 对光子谱仪探测器的事件触发效率进行了研究, 通过计算机模拟分析触发阈值的选取并计算触发效率; 3) 对光子谱仪探测器的事件触发频率进行了研究, 通过计算机模拟对p-p和Pb-Pb两种碰撞模式下的触发频率分别进行了估算和讨论.     

Lower bound for the convergence rate of nonstationary Jacobi-like iteration

Stationary and nonstationary Jacobi-like iterative processes for solving systems of linear algebraic equations are examined. For a system whose coefficient matrix A is an H-matrix, it is shown that the convergence rate of any Jacobi-like process is at least as high as that of the point Jacobi method as applied to a system with 〈A〉 as the coefficient matrix, where 〈A〉 is a comparison matrix of A.     

关于微分熵的一类强偏差定理

利用关于乘积分布密度的相对熵和相对熵率的概念,建立了相依连续型随机变量序列关于参考微分熵的一类强偏差定理,证明中给出了将Laplace变换应用于微分熵强偏差定理的研究的一种途径．     

BLOW-UP RESULTS AND ASYMPTOTIC BEHAVIOR OF THE EMDEN-FOWLER EQUATION u＂ = ｜u｜^p

In this article the author works with the ordinary differential equation u＂ = ｜u｜^p for some p 〉 0 and obtains some interesting phenomena concerning blow-up, blow-up rate, life-span, stability, instability, zeros and critical points of solutions to this equation.     

热丝加热电流对CH薄膜沉积速率和表面形貌的影响

 热丝辅助裂解法是结合气相沉积制备聚对二甲苯薄膜和热丝化学气相沉积而形成的一种制-CH薄膜的新方法。热丝辅助裂解法的最大特点就是在保持低衬底温度情况下可以获得高沉积速率，而热丝加热电流对薄膜沉积速率和薄膜表面形貌具有重要影响。研究表明，热丝加热电流越大，薄膜沉积速率越高，在加热电流9A时，薄膜沉积速率可达0.002mm/min，同时薄膜表面粗糙度随之增加，薄膜表面也开始出现其它元素污染，因此，一般热丝加热电流选择为7A附近。     

非线性不适定问题一种双循环的牛顿型迭代格式

本文研究非线性算子方程F(x)=y的解,结合最速下降法,Newton-Landweber迭代格式及正则化思想,在F满足适当的条件下,构造出新的双循环迭代格式。本文对格式的收敛性进行了严格论证,并估计出迭代格式的收敛精度。     

Al/Al2O3P金属基复合材料的静动态压缩性能及损伤分析

用气压浸渗工艺制备了体积分数40％～50％Al2O3颗粒增强纯铝基复合材料，使用了4种不同尺寸的Al2O3颗粒，其平均粒径分别为5μm、10μm、30μm和60μm．测定了这些复合材料的静、动态压缩性能，并通过材料压缩前后密度变化的测量定量表征了材料的累计损伤，结果表明，与基体材料相似，这些复合材料表现出明显的应变率敏感性；当增强颗粒平均粒径小于60μm时，材料的累计损伤基本与应变率无关，而主要取决于材料的应变．材料中颗粒的破裂主要是由颗粒间的相互作用引起的．较小尺寸颗粒增强的复合材料具有较高的流动应力和较小的累计损伤，并随着颗粒体积分数的增加，材料的流动应力和损伤率都相应增加．     

Synthesis and antibody conjugation of magnetic nanoparticles with improved specific power absorption rates for alternating magnetic field cancer therapy

Bionized nanoferrite (BNF) particles with high specific power absorption rates were synthesized in the size range of 20–100 nm by high-pressure homogenization for targeted cancer therapy with alternating magnetic fields. Several strategies were used to conjugate antibodies to the BNF particles. These strategies were compared using an immunoassay to find optimal conditions to reach a high immunoreactivity of the final antibody–particle conjugate.